文档介绍：February 2000
Materials Letters 42Ž. 2000 326–330
atermatlet
Preparation of hard optical coatings based on an
posite by sol–gel method
Wenxiu Que ), Z. Sun, Y. Zhou, . Lam, . Cheng, . Chan, . Kam
School of Electrical and Electronic Engineering, Nanyang Technological UniÕersity, Singapore 639798, Singapore
Received 3 May 1999; received in revised form 25 August 1999; accepted 27 August 1999
Abstract
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Hard optical coating films based on anically modified silaneŽ. ORMOSIL were obtained by the sol–gel
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technique. Tetraethoxysilane TEOS, SiŽ. OC254 H , g-Glycidoxypropyltrimethoxysilane GLYMO,Ž. CH22 OCH CH O-
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Si OCH 33 , and tetrapropylorthotitanate TIP, TiŽ. O-i-C 3 H 74 were used as precursors for the
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SiO22TiO ORMOSIL coatings. The hardness and Young’s modulus of the coatings were characterized and found to
depend on the heat-treatment temperature. Hardness as high as 10 GPa was achieved at a heat-treatment temperature of
10008C for 20 min. Thermal gravimetric analysisŽ. TGA , scanning electron microscopy Ž. SEM , and Raman spectroscopy
were also used to investigate the structural properties of the coating. It is proposed that the high hardness of the coating film
is related to the carbon and titanium content in the film. q 2000 Elsevier Science . All rights reserved.
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