Fabrication And Mesurement Of Aluminum And Carbon Nanotube Single Electron Transistors For Radio Frequency Applications.pdf

文档介绍：CONTENTS



FIGURES.................................................................................................................. iv
ACKNOWLEDGMENTS......................................................................................... ix
CHAPTER 1: INTRODUCTION…………………………...……………………... 1
Single Electron Tunneling............................................................................. 2
Coulomb Blockade........................................................................................ 5
Charge Sensitivity......................................................................................... 9
Radio-Frequency Single Electron Transistor (RF-SET)............................. 10
Structure of Thesis....................................................................................... 11
CHAPTER 2: FABRICATION OF ALUMINUM SINGLE ELECTRON
TRANSISTORS....................................................................................................... 12
Fabrication of Leads and Bonding-pads...................................................... 12
SET Fabrication............................................................................................ 16
Electron Beam Lithography (EBL)................................................... 16
Double Angle Evaporation................................................................ 19
Fabrication Issues......................................................................................... 21
Measurement Setup...................................................................................... 23
CHAPTER 3: MEASUREMENT OF ALUMINUM SINGLE ELECTRON
TRANSISTORS....................................................................................................... 26
ii
Oxidation vs. Tunneling Resistance............................................................ 26
Thermometer Behavior of SET...