文档介绍：华中科技大学
硕士学位论文
高频声表面波滤波器的纳米压印技术制备研究
姓名:张晓庆
申请学位级别:硕士
专业:物理电子学
指导教师:徐智谋
2011-01-04
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华中科技大学硕士学位论文
摘要
随着通信系统向高频率和高比特速率的发展,对声表面波(SAW)器件的频率要
求也越高,GHz 范围的高频 SAW 器件研究是目前的热点。
SAW 器件向高频化发展,主要由两方面决定:一是器件的叉指换能器线条向更微
细化方向发展,二是器件材料的 SAW 声速向更高方向发展。器件线条的微细化可以直
接提高器件的工作频率,利用纳米压印技术可以实现低成本的,纳米级微细线条的制
备。本论文研究基于纳米压印技术的高频声表面波滤波器的制备。
介绍了声表面波技术背景,概述了叉指换能器、声表面波滤波器的基本理论,并
详细推导了叉指换能器的δ模型和等效电路。阐述了带通声表面波滤波器的主要设计
方法,比较了各种窗口函数加权减低旁瓣的效果,选用汉明窗加权的变迹叉指换能器,
设计出了中心频率为 100MHz,带宽 10MHz 的 SAW 带通滤波器,并用 MATLAB 仿真
了其频响。
利用纳米压印技术对声表面波滤波器进行制备,获得了高频声表面波滤波器的制
备工艺流程。实验获得了叉指电极的线条宽度为 350nm,厚度 30nm 和 200nm 的刻蚀
结果,刻蚀的结果用场扫面电子显微镜(SEM)观测,表面平滑,线条完好,没有发
生连指断指等情况,取得了比较好的效果。为下一步研制出高频 SAW 滤波器器件打下
了基础。

关键词:声表面波滤波器叉指换能器纳米压印
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华中科技大学硕士学位论文
Abstract
As the result of development to be high-frequency and high-bit-rate, munication
system requires higher and higher frequency of SAW(surface acoustic wave) devices.
Therefore, SAW devices of GHz high frequency have e the current hot spots in study.
To increasing the frequency of SAW devices, there are two directions: first, make the
interdigital transducer finger more detailed, the second is to looking for substrate materials
with a higher SAW velocity. Reducing the interdigital transducer finger width can increase
the operating frequency of SAW devices, and using nano-imprint technology can obtain
low-cost, nano-level fine lines. In this study, we discuss using nano-imprint technology to
prepare high-frequency SAW filter.
This thesis introduced the background of Surface Acoustic Wave Technology,
outlined the basic theory of interdigital transducer(IDT) and surface acoustic wave filter, and
detailed deduced the δ model and equivalent circuit model of interdigital transducer.
Explained the main design methods of the horizontal surface acoustic wave bandpass filter,
compared the weighted window function to reduce the side lobe effect, compared the result
which using different window function weighted i