文档介绍:3RD EDITION
Semiconductor
Devices
Physics and Technology
S. M. SZE
EtronTech Distinguished Chair Professor
College of Electrical puter Engineering
National Chiao Tung University
Hsinchu, Taiwan
M. K. LEE
Professor
Department of Electrical Engineering
National Sun Yat-sen University
Kaohsiung, Taiwan
JOHN WILEY & SONS, INC.
Acquisitions Editor Dan Sayre
Marketing Manager Christopher Ruel
Senior Editorial Assistant Katie Singleton
Editorial Program Assistant Samantha Mendel
Production Manager Micheline Frederick
Cover Designer Wendy Lai
Pre-press Service Robots & Cupcakes
This book was typeset in Times Roman by the authors and printed and bound by
Quad Graphics/Versailles. The cover was printed by Quad Graphics/Versailles.
cover photo: © 2010 IEEE. Reprinted, with permission, from IEDM Technical Digest, S. Whang et. al, "Novel
3-dimensional Dual Control-gate with Surrounding Floating-gate (DC-SF) NAND flash cell for 1Tb file storage
application."
The book is printed on acid-free paper.
Copyright © 1985, 2002, 2012 by John Wiley & Sons, Inc. All rights reserved. No part of
this publication may be reproduced, stored in a retrieval system, or transmitted in any
form or by any means, electronic, mechanical, photocopying, recording, scanning, or
otherwise, except as permitted under Sections 107 or 108 of the 1976 United States
Copyright Act, without either the prior written permission of the Publisher or
authorization through payment of the appropriate per-copy fee to the Copyright Clearance
Center, 222 Rosewood Drive, Danvers, MA 01923, (508) 750-8400, fax (508) 750-4470.
Requests to the Publisher for permission should be addressed to the Permissions
Department, John Wiley & Sons, Inc. 605 Third Avenue, New York, NY 10158-0012,
(212) 850-6008, E-mail: ******@. To order books or for customer
service call 1-800-CALL-WILEY (225-5945).
Evaluation copies are provided to qualified academics and professionals for re