2021年特气及毒气Detector侦测器验收基础标准.doc

文档介绍：特气扩充及毒气Detector侦测器扩充验收标准


气体种类
耐压测试
饱压测试
Helium leak
Particle
moisture
Oxygen
GN2
keep the pressure≥ 2hr,and the pressure is 9kg/cm2
keep the pressure≥ 24hr,and the pressure is 8kg/cm2
--------
≤ 50pc/cft at µm
--------
--------
SiH4
keep the pressure≥ 2hr,and the pressure is 9kg/cm2
keep the pressure≥ 24hr,and the pressure is 8kg/cm2
≤ 2×10-9atm cc/sec
≤ 20pc/cft at µm
≤10 Inlet+10ppb
≤10 Inlet+10ppb
%PH3H2
keep the pressure≥ 2hr,and the pressure is 9kg/cm2
keep the pressure≥ 24hr,and the pressure is 8kg/cm2
≤ 2×10-9atm cc/sec
≤ 20pc/cft at µm
≤10 Inlet+10ppb
≤10 Inlet+10ppb
NF3
keep the pressure≥ 2hr,and the pressure is 9kg/cm2
keep the pressure≥ 24hr,and the pressure is 8kg/cm2
≤ 2×10-9atm cc/sec
≤ 20pc/cft at µm
≤10 Inlet+10ppb
≤10 Inlet+10ppb
%TMBH2
keep the pressure≥ 2hr,and the pressure is 9kg/cm2
keep the pressure≥ 24hr,and the pressure is 8kg/cm2
≤ 2×10-9atm cc/sec
≤ 20pc/cft at µm
≤10 Inlet+10ppb
≤10 Inlet+10ppb

。
、规格及管径大小是否正确。
。
，管线材质是否正确。
，固定是否良好。
、高度、路径是否符合设计规格。
。
8目视检验各系统管线是否水平或垂直无歪斜。
9完工数据须包含现场各系统供给之会签纪录及测试统计窗体。
10完工资料须包含每一气柜之配管示意图。
11完工数据须包含工程相片。
13完工资料须包含承包商自主检验表。
14全部完工图面及完工数据皆须有电子磁盘档案﹙Auto CAD 20XX﹚
15 检验新增设备功效是否完全根据业主方进行设定，设备位置是否按图纸计划
二 气柜要求及测试标准
功效要求
Name
Qty
Cyl
Purge
Pigtail
Cylinder connector
Auto Guard
%PH3H2 GC
3
2+1
Auto
　
CGA
√
NF3 BSGS
1
4Y
Auto
√
Diss
√
SiH4 BSGS
1
4Y
Auto
√
Diss
√
%TMBH2 GC
3
2+1
Auto
　
CGA
√
Name
Auto switch
Sprinker
Touch Screen
Controller

Process Filter
%PH3H2 GC
√
√
√
PLC
√
Pre40µm µm
NF3 BSGS
√
√
√
PLC
√
Pre40µm µm
%TMBH2 GC
√
√
√
PLC
√
Pre40µm µm
SiH4 BSGS
　
√
√
PLC
√
Pre40µm µm
Name
Panel piping size
Local Scubber
Test port