文档介绍：≥2hr,andthepressureis9kg/cm2keepthepressure≥24hr,andthepressureis8kg/cm2--------≤50pc/µm----------------SiH4keepthepressure≥2hr,andthepressureis9kg/cm2keepthepressure≥24hr,andthepressureis8kg/cm2≤2×10-/sec≤20pc/µm≤10Inlet+10ppb≤10Inlet+%PH3H2keepthepressure≥2hr,andthepressureis9kg/cm2keepthepressure≥24hr,andthepressureis8kg/cm2≤2×10-/sec≤20pc/µm≤10Inlet+10ppb≤10Inlet+10ppbNF3keepthepressure≥2hr,andthepressureis9kg/cm2keepthepressure≥24hr,andthepressureis8kg/cm2≤2×10-/sec≤20pc/µm≤10Inlet+10ppb≤10Inlet+%TMBH2keepthepressure≥2hr,andthepressureis9kg/cm2keepthepressure≥24hr,andthepressureis8kg/cm2≤2×10-/sec≤20pc/µm≤10Inlet+10ppb≤10Inlet+。、规格及管径大小是否正确。。,管线材质是否正确。,固定是否良好。、高度、路径是否符合设计规格。。8目视检查各系统管线是否水平或垂直无歪斜。9竣工数据须包含现场各系统供应之会签纪录及测试记录窗体。10竣工资料须包含每一气柜之配管示意图。11竣工数据须包含工程相片。13竣工资料须包含承包商自主检查表。14所有竣工图面及竣工数据皆须有电子磁盘档案﹙AutoCAD2004﹚15检查新增设备功能是否完全按照业主方进行设定,%PH3H2GC32+1Auto CGA√NF3BSGS14YAuto√Diss√SiH4BSGS14YAuto√Diss√%TMBH2GC32+1Auto CGA√%PH3H2GC√√√PLC√Pr