文档介绍：CHARACTERIZATION OF RESIDUAL STRESS IN
MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES USING
RAMAN SPECTROSCOPY
DISSERTATION
LaVern A. Starman
Captain, USAF
AFIT/DS/ENG/02-01
DEPARTMENT OF THE AIR FORCE
AIR UNIVERSITY
AIR FORCE INSTITUTE OF TECHNOLOGY
Wright-Patterson Air Force Base, Ohio
APPROVED FOR PUBLIC RELEASE; DISTRIBUTION UNLIMITED.
Research sponsored in part by the Air Force Research Laboratory, Air Force Materiel
Command, USAF. The United States Government is authorized to reproduce and
distribute reprints notwithstanding any copyright notation thereon. The views and
conclusions contained in this dissertation are those of the author and should not be
interpreted as necessarily representing the official policies or endorsements, either
expressed or implied, of the Air Force Research Laboratory, Department of Defense,
or the United States Government.
AFIT/DS/ENG/02-01
CHARACTERIZATION OF RESIDUAL STRESS IN
MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES
USING RAMAN SPECTROSCOPY
DISSERTATION
Presented to the Faculty
School of Engineering and Management
Air Force Institute of Technology
Air University
Air Education and mand
In Partial Fulfillment of the Requirements for the
Degree of Doctor of Philosophy in Electrical Engineering
LaVern A. Starman, ., .
Captain, USAF
April 2002
APPROVED FOR PUBLIC RELEASE; DISTRIBUTION UNLIMITED.
Acknowledgements
Without the constant love, support, prayers, and understanding of my won-
derful wife and son, this dissertation research effort would not have been possible.
Despite my many absences from home, both physically and mentally, my heart and
thoughts were always with you. I would like to thank my Mom, as well as my Parents
In-Law, for understanding the many months between visits and the constant love
and support you provided my family in my absence. I would also like to thank our
friends, Lynn, Ginge, Ryan, Leslie, Chris, Randy, and Dina who called