文档介绍：特气扩充及毒气Detector侦测器扩充验收标准
气体种类
耐压测试
饱压测试
Helium leak
Particle
moisture
Oxygen
GN2
keep the pressure≥ 2hr,and the pressure is 9kg/cm2
keep the pressure≥ 24hr,and the pressure is 8kg/cm2
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≤ 50pc/cft at µm
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SiH4
keep the pressure≥ 2hr,and the pressure is 9kg/cm2
keep the pressure≥ 24hr,and the pressure is 8kg/cm2
≤ 2×10-/sec
≤ 20pc/cft at µm
≤10 Inlet+10ppb
≤10 Inlet+10ppb
%PH3H2
keep the pressure≥ 2hr,and the pressure is 9kg/cm2
keep the pressure≥ 24hr,and the pressure is 8kg/cm2
≤ 2×10-/sec
≤ 20pc/cft at µm
≤10 Inlet+10ppb
≤10 Inlet+10ppb
NF3
keep the pressure≥ 2hr,and the pressure is 9kg/cm2
keep the pressure≥ 24hr,and the pressure is 8kg/cm2
≤ 2×10-/sec
≤ 20pc/cft at µm
≤10 Inlet+10ppb
≤10 Inlet+10ppb
%TMBH2
keep the pressure≥ 2hr,and the pressure is 9kg/cm2
keep the pressure≥ 24hr,and the pressure is 8kg/cm2
≤ 2×10-/sec
≤ 20pc/cft at µm
≤10 Inlet+10ppb
≤10 Inlet+10ppb
。
、规格及管径大小是否正确。
。
,管线材质是否正确。
,固定是否良好。
、高度、路径是否符合设计规格。
。
8目视检查各系统管线是否水平或垂直无歪斜。
9竣工数据须包含现场各系统供应之会签纪录及测试记录窗体。
10竣工资料须包含每一气柜之配管示意图。
11竣工数据须包含工程相片。
13竣工资料须包含承包商自主检查表。
14所有竣工图面及竣工数据皆须有电子磁盘档案﹙Auto CAD 2004﹚
15 检查新增设备功能是否完全按照业主方进行设定,设备位置是否按图纸规划
二气柜要求及测试标准
功能要求