文档介绍：I毕业设计论文题目名称:超精密三坐标测量仪整机机构设计院系名称:班级:学号:学生姓名:指导老师:年月II超精密三坐标测量仪整机机构设计摘要本文中,对三坐标测量仪的研究现状和精密测量的关键技术做了总结,对所设计的测量仪的总体布局、床身的选材、导轨的设计、进给方式的选择做了介绍,选用燕尾型气体静压导轨,同步齿形带和钢带传动,摩擦杆进行驱动。对移动桥和溜板进行了简单的ANSYS分析,计算了移动桥受力时最大的变形量和直线度;选用伺服电机作为动力源,并对其进行了简单的功率计算,分析了测量仪的工作环境对其精度的影响和它的应用环境;定位采用开式光栅尺,对光栅尺的选型做了比较。最后针对测量仪整机进行精度分析,查找误差源和精度的综合分析。关键词:超精密、气静压、高精度、精密测量IIIThreeCoordinatesMeasuringInstrumentUltra-precisionMachineMechanismDesignABSTRACTInthispaper,threecoordinatesmeasuringinstrumentforprecisionmeasurement,theresearchpresentsituationandthekeytechnologyofsummingup,thedesignofmeasuringinstrumentlathebedofthegenerallayout,thedesignoftheselectionofmaterials,guiderail,intotothechoiceofthewaysofdoingintroduced,choosecoattails"typeaerostaticguiderail,synchronouscogbeltandsteelbelttransmission,,thelargestmobilebridgewhenstressdeformationandstraightness;Chooseservomotorasapowersource,andanalysesthesimplepowercalculation,analyzestheworkingenvironmentofmeasuringapparatustotheprecisionoftheinfluenceanditsapplicationenvironment;,accordingtothemeasuringapparatusforprecisionanalysis,:Theultraprecision,Gasstaticpressure,uracy,Precisionmeasurement1目录1绪论................................................................................................................................................................................................................................................................................................................................................................................................................................................................................................................................................62超精密三坐标测量仪整机机构介绍......................................................................................................................................