文档介绍：M5111-4W/UM 型高温氧化/扩散系统
使用说明书
中国电子科技集团公司第四十八研究所
2006年4月
中国电子科技集团公司第四十八研究所
目录
························ (2)
产品特点···················· (2)
主要用途及适用范围··············· (2)
品种、规格··················· (2)
型号的组成及其代表意义············· (3)
使用环境要求·················· (3)
工作条件要求·················· (3)
················· (4)
总体结构···················· (4)
各部件结构··················· (4)
系统控制原理·················· (7)
系统各主要单元功能结构及工作原理········ (7)
···················· (9)
、重量····················· (9)
、调试·····················(10)
安装条件····················(10)
安装程序、方法及注意事项············(10)
调试程序、方法及注意事项············(10)
SiC 桨及石英炉门的装调·············(10)
调试恒温区的方法及验收判据···········(11)
试运行前的准备、试运行启动、试运行·······(12)
、操作·····················(12)
温控仪的使用··················(12)
恒温槽的操作使用