文档介绍：Surface Micromachined …………………
ZHANG San-fengFoundation item: Keygrant Project of Chinese Ministry of Education (…)
* E-mail: sjtuapaper2006@
(张三丰), HUANG Fei-hong (黄飞鸿), ……
( Research Institute of …………….,
Shanghai Jiao Tong University, Shanghai 200030, China )
Abstract: For radio frequency applications, miniaturized integrated inductor of high performance is very important. However, miniaturized integrated inductors often suffer from low Q-factor and/or fres ( self-resonant frequency ). In this paper, …….
Key words: solenoid inductor ; RF MEMS ; quality factor ; electroplating
Document code: A
Introduction
To meet requirements in munications and microwave integrated circuits, the passive RF (radio frequency) inductors are used in a variety of important applications. Many results have been reported to improve the performance of microinductors. However,…..
In this paper, we proposed a new method for fabricating ….
1 Fabrication
shows a brief description of the fabrication process. ….
(e) (f)
Substrate Seed layer Photoresist Copper
. Schematic of the simplified fabrication process.
2 Results and discussion
shows the SEM photograph of a fabricated ….
3 Conclusion
In this work, …..
References
[1] C. L. Yung, Weijiang Zeng, Pick Hong Ong, et al. A concise process technology for 3-D suspended radio frequency micro-inductors on silic