文档介绍：Available online at hanism
and
Machine Theory
Mechanism and Machine Theory 43 (2008) 400–410
ate/mechmt
Input coupling analysis and optimal design of a
3-pliant micro-positioning stage
Wang Hua, Zhang Xianmin *
School of Mechanical Engineering, South China University of Technology, Guangzhou, Guangdong 510640, PR China
Received 11 July 2006; received in revised form 14 November 2006; accepted 12 April 2007
Available online 11 June 2007
Abstract
Input coupling is an important factor needing to be considered in the process of designing a precision micro-positioning
mechanism. Couplings between the input bodies will cause serious difficulties in the motion control. Firstly, an input cou-
pling analysis method is presented for a 3-DOF micro-positioning stage. The method is validated by the ANSYS simula-
tion and experiment results. Secondly, the influences of the structural parameters of the mechanism on the input coupling
are discussed. Finally, three different contact cases versus the input coupling are analyzed, and an optimal design method is
developed. Numerical results show that the input couplings of the optimized stage are reduced remarkably. The research
results of this paper are helpful to design a low coupling micro-positioning system.
Ó 2007 Elsevier Ltd. All rights reserved.
Keywords: Input coupling; Micro-positioning stage; Finite element method; Optimal design
1. Introduction
The micro-positioning stages are critically important to both the mechanical and electronic industries in
products such as optical disks, munication systems, optical disk recorders, and semiconductor manu-
facturing machines. The majority of these stages are based on the use of the piezoelectric ceramic actuators
and pliant mechanisms [1–3]. Compliant mechanisms are flexible structures, which can generate the
desired motions by undergoing elastic deformation instead of through rigid linkage/joints as in rigid body
mechanisms. It is suitable to be use