文档介绍：Mechanism and Machine Theory 44 (2009) 1156–1175
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Mechanism and Machine Theory
journal homepage: ate/mechmt
ostatic modeling of 3-pliant
micro-motion stages with flexure hinges
Yuen Kuan Yong a,*, Tien-Fu Lu b
a School of Electrical Engineering puter Science, The University of Newcastle, Callaghan, NSW 2308, Australia
b School of Mechanical Engineering, The University of Adelaide, SA 5005, Australia
article info abstract
Article history: This paper presents the derivation of the ostatic model of a flexure-based 3--
Received 9 February 2007 pliant micro-motion stage. The ostatic model has closed-form equations and flexure
Received in revised form 10 June 2008 pliances are one of the variables in the model. Researchers have an option of
Accepted 8 September 2008
selecting the most suitable flexure pliance equations to calculate the ostat-
Available online 5 November 2008
ics of the stage. Two cases are studied where two ostatic results are obtained using
two different sets of flexure hinge equations. The ostatic results pared to
Keywords:
the finite-element-analysis results to verify their accuracies.
ostatic model
Crown Copyright Ó 2008 Published by Elsevier Ltd. All rights reserved.
3-RRR
Compliant mechanism
Flexure hinge
Finite-element-analysis
1. Introduction
Micro-motion stages have emerged as an important technological advancement in the past three decades. The signifi-
cance of this advancement is highlighted in many applications where the positioning ponents with micrometer or
nanometer accuracy is required. Examples include the positioning of samples in a scanning-electron-microscope (SEM),
the alignment of fibre-optics and lasers, the positioning of masks in lithography, the manipulation of cells in micro-biology
and the manipulation of micro-ponents in micro-assembly. Most of the micro-motion stages are designed based on
pliant mechanism concept. Compliant mechanisms generate their mo