衬底效应对litao3薄膜制备的影响..doc

文档介绍：,2,黄大贵1,李金华3,但迪迪3,董政1(;;【摘要】用溶胶凝胶法在N型硅、P型硅、石英、铂、镍衬底上制备了钽酸锂(LiTaO3薄膜,用XRD和SEM对钽酸锂薄膜性能参数进行了表征;发现掺杂少量环氧树脂能提高钽酸锂薄膜的均匀性,改善薄膜与衬底的粘附性;研究了衬底效应与薄膜厚度的关系,,Ni衬底的XRD峰值强度几乎不再出现,说明衬底对薄膜初始结晶取向有重要影响;利用不同衬底上生长钽酸锂薄膜,XRD研究结果表明:N型硅、P型硅、石英衬底上只能制备多晶钽酸锂薄膜,铂衬底上制备的钽酸锂薄膜在(012晶向有强大的择优取向性,镍衬底上制备的钽酸锂薄膜有更好的C轴择优取向性,。关键词LiTaO3;择优晶向;溶胶凝胶;衬底效应;薄膜中图分类号TN215文献标识码ASubstrateEffectsonPreparationofLiTaO3ThinFilmsZHANGDe-yin1,2,HUANGDa-gui1,LIJin-hua3,DANDi-di3,DONGZheng1(,UniversityofElectronicScienceandTechnologyofChinaChengdu610054;,CivilAviationFlightUniversityofChinaGuanghanSichuan618307;,JiangsuPloytechnicUniversity,ChangzhouJiangsu213016AbstractThesol-gelderivedLiTaO3thinfilmswerepreparedonthesubstratesofN-typeSi(100,P-typeSi(111,Quartz,Pt/TiO2/SiO2/Si(100,andNickel,