文档介绍：
基于薄膜体声波谐振器的超高分辨率
MEMS 湿度敏感元件#
赵洪元,张代化,庞慰,张浩**
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(天津大学精密仪器与光电子工程学院,天津 300072)
摘要:本文介绍了一种基于旋涂了 PVA 薄膜的 MEMS 薄膜体声波谐振器的高分辨率湿度传
感器。本传感器表现出对水蒸气的高敏感度,并可通过监测薄膜体声波谐振器的串联谐振频
率变化检测小至 %的相对湿度变化。集成了这种器件的 CMOS 振荡电路和射频前端芯
片将为基于质量传感的薄膜体声波谐振器在化学和生物传感领域的广泛应用创造极大的潜
力
关键词:湿度传感器;MEMS;体声波谐振器
中图分类号:TN385
Ultrahigh-resolution MEMS Humidity Sensing
ElementsBased On Film Bulk Acoustic Wave Resonators
Hongyuan Zhao, Daihua Zhang, Wei Pang, Hao Zhang
(State Key laboratory of Precision Measuring Technology and Instruments, Tianjin University,
Tianjin,300072)
Abstract: In this paper a high-resolution humidity sensor based on MEMS FBAR with spin-coated
PVA thin film is reported. The sensors exhibit very high sensitivity to water vapor and are able to
detect down to % change in relative humidity by monitoring the shift in
series resonant frequency of the FBARs. The integration of these devices with CMOS
oscillating circuits and RF front-end chips will create great potential of FBAR based mass sensors
in a wide variety of applications in chemical and biological sensing.
Key words: Humidity sensor, MEMS, Bulk acoustic wave resonator.
0 引言
由于具有尺寸小,重量轻,功耗低,性能高,易集成,IC 兼容,价格低的特点,薄膜
声波谐振器(例如 SAW 和薄膜体声波谐振器)逐渐取代石英晶体天平(QCM)引起人们的
广泛关注。基于微小机械器件的质量传感器在检测浓度在 nM 级别的气体及生化物质方面已
经表现出了巨大的潜力。
随着不同环境、不同应用领域(如气象学、fort、农业、过程控制、食品科
学领域)相对湿度的检测对精确、低价、可靠的化学传感器的需求日益增强,目前