文档介绍：MEMS Linear and Nonlinear Statics and Dynamics
MICROSYSTEMS
Series Editors
Roger T. Howe
Stanford University
Antonio J. o
NASA Ames Research Center
For further volumes:
ies/6289
Mohammad I. Younis
MEMS Linear and Nonlinear
Statics and Dynamics
2123
. Mohammad I. Younis
Department of Mechanical Engineering
State University of New York
Binghamton, NY
USA
******@
ISSN 1389-2134
ISBN 978-1-4419-6019-1 e-ISBN 978-1-4419-6020-7
DOI -1-4419-6020-7
Springer New York Dordrecht Heidelberg London
Library of Congress Control Number: 2011930834
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To my parents Ibrahim and Halemah
My wife Ola
and our sons
Ibrahim, Muhmoud, and Mutaz
Preface
Several decades have passed by since the discovery and development of micro-
electro-mechanical systems (MEMS).This technology has reached a level of maturity
that, today, several MEMS devices are being used in our every-day life, ranging from
accelerometers and pressure sensors in cars, micro-mirrors in Plasma TVs, radio-
frequency (RF) switches and microphones in cell phones, and inertia sensors in video
games. Fabrication meth