文档介绍：Contents
1 MEMS, Their Features, and Modeling Challenges ................. 1
What Are MEMS and Why They Are Attractive? ................ 1
Why We Need Modeling and Simulation Tools? ................. 4
Challenges of MEMS Modeling and Simulations ................ 4
Coupled-Field MEMS Phenomena ............................ 7
Squeeze-Film Damping ............................... 7
Thermoelastic Damping ............................... 8
Pull-in Instability .................................... 8
Stiction Due to Capillary Forces ........................ 9
The State-of-the-Art of MEMS Modeling and Simulations ........ 10
Problems .................................................. 11
References ................................................ 11
2 Vibrations of Lumped-Parameter Systems ........................ 13
Introduction ............................................... 13
Free Vibration of Single-Degree-of-Freedom Systems ............ 14
Undamped Vibration ................................. 14
Damped Vibration .................................... 18
Forced Harmonic Excitation of Single-Degree-of-Freedom
Systems ................................................... 22
Vibrating MEMS Gyroscopes ................................ 28
Base Excitations of SDOF Systems and
Accelerometers Principles ................................... 32
Response of SDOF Systems to Arbitrary Excitation .............. 36
Vibrations of Two-Degree-of-Freedom Systems ................. 40
Undamped Free Vibration and Eigenvalue Problem ........ 40
Modal Analysis ...................................... 43
Resonances in 2-DOF Systems ......................... 47
Numerical Integration ....................................... 48
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MEMS Band-Pass Filters .................................... 52
Problems .............................