文档介绍：CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Cryo-Torr® High-Vacuum Pump Installation,
Operation and Maintenance Instructions
8040613
Rev. A (4/2001)
HELIX TECHNOLOGY CORPORATION
The information in this document is believed to be accurate and reliable. However,
Helix Technology Corporation, cannot accept any financial or other responsibilities that may
result from the use of this information. No warranties are granted or extended by this document.
Helix Technology Corporation reserves the right to change any or all
information contained herein without prior written notice. Revisions may be issued at the time of
such changes and/or deletions.
Any duplication of this manual or any of its parts without expressed written permission from
Helix Technology Corporation is strictly prohibited.
Any correspondence regarding this document should be forwarded to:
Helix Technology Corporation
Mansfield Corporate Center
Nine Hampshire Street
Mansfield, Massachusetts 02048-9171 .
Telephone: (508) 337-5000
FAX: (508) 337-5464
The following Helix Technology Corporation trademarks and service marks may appear in this
document:
Conductron™ Convectron® Cryodyne® Cryogen®
Cryogenerator® Cryo-Torr® CTI-Cryogenics® FastRegen™
GOLDLinkSM Granville-Phillips™ GUTS® Helix Technology.. Your
Vacuum ConnectionSM
Helix® Micro-Ion® Mini-Ion™ On-Board®
RetroEase® RetroFast® Stabil-1® Stabil-Ion®
ThinLine™ TurboPlus® Vacuum AssuranceSM
All other trademarks or registered trademarks are the property of their respective holders.
Copyright© 2001 Helix Technology Corporation Printed in .
Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Table of Contents
Section 1 - Cryo-Torr Cryopump Description
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Installation, Operation, and Service I