文档介绍：英文
microprocessor
World microprocessor market,Intel's hegemony in March 8,2000 launch 1GHz Pentium 3 microprocessors,the same year,June 28 launch of Pentium 4 microprocessor. June 9 the same year,AMD Introduces 1GHz AMD Athlon processor. The same year,IBM launched the beta 1GHz processor Power 4. They marked a microprocessor IC chip,as represented by the person into the GHz era. Manufacture of more than 1GHz chip IC has two channels,one continued to narrow the chip feature size,in accordance with the guidelines for the direction of Moore's Law continues down. 2001 "Guide to International Technology Roadmap for Semiconductors" (1TRS) planning,in 2001 the chip feature size up to ~ m,2004 years and 90nm,2007 reach 70nm,2010 reach 50nm,2013 reach 30nm,2016 reach 22nm. Chip feature size to achieve the goal of shrinking,the need for skilled,mature deep sub-micron,nanometer micro-processing technology,such as lithography,precise control of doping technology,thin film with ultra-thin films (including the high-k / low-k membrane dielectric constant) growth technology ,b are looking for new material to relax in order to further reduce the chip feature size requirements,such as substitution of aluminum wiring with copper wiring,using silicon-on-insulator(SOI,Silicon-on-Insulator) silicon wafer,such as alternative. In the first way to reduce the chip feature size can improve