文档介绍：Furnace Layout and Visualization
VGF Multicrystallizer 732 Si
Layout: Overview
Safety Concept
Thermocouples
Visualization: Overview
Operation
Process Control
Alarms
VGF Layout and Visualization | 4-6-2011 | TWNE | 1 |
top heater
Overviewcircumferential
VGF Multicrystallizerheater 732 Si
top-shield furnace vessel
Venting gap
directional
heat insulation
solidification
silicon melt/
bottom heater ingot
crucible
water cooled copper plate
growing mc ingot
protection tray
VGF Layout and Visualization | 4-6-2011 | TWNE | 2 |
Safety Concept
VGF Multicrystallizer 732 Si
Double Thermocouples Efficient Release of Overpressure
2 redundant thermocouples Unclamped vessel lid provides
for every heater overpressure release
Support frame design
Hotzone with closed
bottom insulation Solid frame with CC-
clamps