Kinematic-design-of-large-displacement-precision-XY-positioning-stage-by-using-cross-strip-flexure-joints-and-over-constrained-mechanism_2008_Mechanism-and-Machine-Theory.pdf

文档介绍：heory43(2008)724–737ate/mechmtKinematicdesignoflargedisplacementprecisionXYpositioningstagebyusingcrossstripflexurejointsandover-constrainedmechanismYeong-junChoi*,,ByungJinChoiDepartmentofMechanicalEngineering,UniversityofTexasatAustin,Austin,TX78712,USAReceived14February2005;accepted22May2007Availableonline30July2007AbstractFlexuresarewidelyusedinprecisionmachinessincetheyofferfrictionless,particle-free,andlowmaintenanceopera-tion,-constrainedmechanismisusedtoincorporatesymmetrytocancelouttheeffectsofcentershiftinginlarge---motionflexure-basedXYstagescanbeacost-effectivesolutionforsemiconductorapplications,particularlytheonesthatoperateinvacuum.Ó:Flexure;Motionstage;Screwsystemtheory;Over-,aflex-urejointwasproposedinthe1960s[6].Flexurejointsdonothavestick–-–displacementcurvesareknown,thenthedisplacementsthatarecontinuousatallrangescanbecalcu-,[8]designedandanalyzedaflexure-u--.[13]*:MolecularImprints,Inc.,1807WestBrakerLn.,C-100,Austin,TX78758,.:+**********;fax:+**********.E-mailaddress:ychoi@(Y.-).0094-1