文档介绍：精品文档,值得下载收藏!
精品文档,值得下载收藏!
精品文档,值得下载收藏!
一种新型的压阻式硅微二维加速度计的设计
张国军,陈尚,薛晨阳,乔慧,张开锐
(中北大学电子测试技术国家重点实验室太原 030051)
摘要:以压阻检测技术为基础并结合硅微 MEMS 加工技术设计了一种二维加速度计微结构, 期望利用该新型的结构提高
加速度计的灵敏度,实现二维方向的加速度检测。该加速度计采用四个相互垂直的悬臂梁支撑中间有刚硬柱体的结构,通过
利用合理布置的压敏电阻构成的惠斯通电桥测量水平面内两个方向的加速度。建立了该结构的数学模型并用有限元分析软件
ANSYS 对敏感弹性元件进行分析。最后对加工出的加速度计进行了相关的测试。测试结果表明:该加速度计水平面内两个
方向的灵敏度高、线形度较好, X 向灵敏度为 2 mv/g,线性度为 67,Y 向灵敏度为 3 mv/g,线性度为 66。
关键词:二维加速度计;压阻效应;MEMS;ANSYS
中图分类号:TP212 文献标识码:A 国家标准学科分类代码:
The design of a novel piezoresistive two-axis accelerometer based on silicon
Zhang Guojun, Chen Shang, Xue Chenyang, Qiao Hui, Zhang Kairui
(National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China )
Abstract:A novel of Two-Axis accelerometer is presented in this paper, which is based on piezoresistive detection
and fabricated on a single-crystalline-silicon using MEMS technology. It is desirable that the application of
ingenious structure of the accelerometer may improve the sensitivity. The sensor consists of four vertical cantilever
beams with attached cylinder in the center of the structure. By locating the resistor logically formed the Wheatstone
birdge, this sensor can measure the acceleration in two-direction. The calibration method and finite element method
(FEM) for the accelerometer are proposed. The