comsol等离子体放电二维模型.pdf

文档介绍：,onepowered(theanode)andonegrounded(thecathode).Thepositivecolumniscoupledtoanexternalcircuit:1000ΩCathodePlasmaAnodeV1pFFigure1:-’sGuide.∂()∇n+⋅[]–n()μ•E–D•∇n=R∂teeeeee∂()∇n+⋅[]–n()μ•E–D•∇n+E⋅Γ=R∂tεεεεεeεwhere:1|()μ••∇e=–eEne–,putedfromtheelectronmobilityusing:5D=μT,μ=---μ,D=μTeeeε->>,theelectronsourcetermisgivenby:MRxkNne=jjnej=1wherexjisthemolefractionofthetargetspeciesforreactionj,kjistheratecoefficient33forreactionj(m/s),andNnisthetotalneutralnumberdensity(1/m).,theelectronsourcetermisgivenby:MRxαNΓe=jjnej=1α2ΓwherejistheTownsendcoefficientforreactionj(m)andeistheelectronfluxasdefinedabove(1/(m2·s)).:PRxkNnΔεε=jjnejj=1Δεwherejistheenergylos