利用衬底温度调控AZO透明导电薄膜的光电性能.doc

文档介绍：
利用衬底温度调控 AZO 透明导电薄膜的光
电性能#
孙秀英,李福山**
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(福州大学物理与信息工程学院,福州 350002)
摘要:掺铝氧化锌(AZO)具有环境友好、储量丰富以及光电性能优越等优点,目前成为透
明导电领域的研究热点。本文采用射频磁控溅射技术制备 AZO 透明导电薄膜,通过改变薄
膜衬底的加热温度对 AZO 薄膜的光电性能进行调控和优化。研究不同衬底温度对于薄膜的
晶体结构的影响,进而分析衬底温度对于薄膜的导电性能、光学性能的影响,得到具有最佳
光电性能的 AZO 薄膜衬底加热温度。
关键词:物理电子学;掺铝氧化锌;导电薄膜;磁控溅射;衬底温度
中图分类号:TN27
Controlling the optoelectronic properties of AZO
transparent conductive film by varying the substrate
temperature
SUN Xiuying, LI Fushan
(College of Physics and Information Engineering, Fuzhou University, FuZhou 350002)
Abstract: Al-doped zince oxide (AZO)has e the hot topic due to its unique advantages, such
as environmental friendly, abundant reserves, and excellent optoelectronic properties. In this paper,
AZO transparent conductive thin films were fabricated by using radio frequency ron
sputtering. The optoelectronic properties of the AZO films were optimized by varying the heating
temperature of the substrate. The effect of different substrate temperature on the crystal structure
of the AZO films was investigated. And the impact of various substrate temperature on the
conducting and optical properties of the AZO films was further studied. The heating temperature
for achieving the AZO films with the best optoelectronic properties was obtained.
Keywords: Physical electronics; AZO; Conductive film; ron sputtering; Substrate
temp