文档介绍：中文摘要
中文摘要
飞秒激光具有极短的脉冲宽度，这使它拥有极高的峰值功率，可以实现对任
何材料的非热熔性加工。通过控制激光脉冲聚焦点在材料上的移动，可以实现材
料的高精度三维微加工。目前利用飞秒激光直写技术在金属薄膜材料表面制备周
期性微结构，已成为飞秒激光应用研究领域的热点之一。
结合飞秒激光的高斯型空间分布特性，推导了横向和轴向加工分辨率的表达
式，初步研究了飞秒激光与透明介质和金属材料之间的相互作用机制。自行设计
并建立了一套由显微镜和微精密移动平台等构成的飞秒激光三维微细加工系统。
利用飞秒激光三维微细加工系统，研究了 K9 玻璃表面加工线宽与飞秒激光脉
冲参数之间的关系。优化选择加工参数，实现了微米甚至纳米量级的微加工精度，
其最小加工精度为 540nm。
研究了飞秒激光脉冲与金膜的相互作用，通过改变显微物镜的数值孔径、激
光单脉冲能量、脉冲个数等参数制备出不同的金膜表面微结构。研究表明，激光
作用在金膜表面会诱导出微孔结构，作用时的激光参数对微孔形貌、尺寸大小都
有很大影响。
应用飞秒激光在金膜表面制备周期孔洞结构和周期方格结构，并采用宽带光
纤光源和 HR-i550 光谱仪测量金膜表面周期孔洞结构和周期方格结构的光谱透射
性能。
关键词：飞秒激光；三维微加工；微结构
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黑龙江大学硕士学位论文
Abstract
The technology of femtosecond laser machining can realize the non-thermal
processing of almost any materials due to ultrashort time duration and ultrahigh peak
fluence. Three-dimensional microfabrications with high precision can be attained by
controlling the movement of the focal spot. Presently, there has been an increasing
interest in fabricating microstructure in the various materials by a femtosecond laser.
The formula of lateral and axial resolutions of fabrications was given based on
the Gaussian function of the laser. Further, the theory of interaction between the
femtosecond laser and transparent material was discussed. And a direct scanning
micro-fabrication system was set up. The system included laser system, microscope
system and the controlling program based on the LABVIEW.
The relationship of the line width and laser parameters was investigated by using
the micro-fabrication system. Through optimizing the parameter of fabrication, the
micro-fabrication resolution of 540nm at the surface of K9 glass was attained.
And then, the effects of some parameters such as the numerical aperture of object
lens, lase