文档介绍：Available online at hanism
and
Machine Theory
Mechanism and Machine Theory 43 (2008) 347–363
ate/mechmt
The effect of the accuracies of flexure hinge equations on
the pliances of planar micro-motion stages
Yuen Kuan Yong *, Tien-Fu Lu
School of Mechanical Engineering, The University of Adelaide, SA 5005, Australia
Received 23 May 2006; received in revised form 20 February 2007; accepted 22 March 2007
Available online 28 June 2007
Abstract
This paper presents the effect of the accuracies of flexure pliance equations (the accuracies vary with a geo-
metrical ratio, t/R of a hinge) on the pliances of RRR and 3-RRR micro-motion stages. Closed-form output
compliance models of the stages are derived (with flexure pliances as one of the variables) to investigate the
aforementioned effect. The pliances, calculated using various flexure hinge equations, pared to that
of the finite element analysis (FEA) and the results are discussed.
Crown Copyright Ó 2007 Published by Elsevier Ltd. All rights reserved.
Keywords: Micro-motion stage; pliance; Flexure hinge equation
1. Introduction
Compliant micro-motion stages have emerged as an important technological advancement due to its grow-
ing applications in the field of micro-machining, scanning electron microscopy, assembly of micro-systems, the
alignments of fibre-optic and laser, micro-lithography and biological cell manipulation. Compliant stages,
which consist of flexure hinges, are capable of providing smooth motions through structural deformations.
Kinematic, static and dynamic models are needed to analyse and to synthesise the behaviour of a particular
compliant stage design. In order to improve the accuracy of these models, the modelling of flexure hinge defor-
mations pliances (inverse of stiffness) are required to be accurate. Various flexure pliance
equations were derived to predict the deformation and stiffness of a flexure hinge. Methods such as the inverse
conformal mapping [1], finite element