文档介绍：基于微控制器的风速风向传感器系统设计*
张燕波,沈广平,董自强,秦明,黄庆安
(东南大学MEMS教育部重点实验室南京 210096)
摘要:提出了一种基于惠斯通全桥电路的热式风速风向传感器系统设计方案。传感器芯片结构利用ANSYS软件进行了热学和电学的耦合仿真,并进行了结构优化。芯片采用剥离工艺在陶瓷衬底上加工而成,利用直接安装技术对传感器进行封装。系统采用恒温差工作原理进行控制,热温差工作原理测量风速和风向。系统中微控制器集成的电流型D/A对传感器恒温差控制模式的初始状态进行设定,同时补偿环境温度的变化造成的输出信号的漂移,使得系统的工作温度扩展到-40~60 ℃。热温差检测模式利用位于片上的8个温敏元件构成两路惠斯通全桥电路连接,这种设计在保证灵敏度的同时提高了其测量范围。本系统的微控制器集成了大量模拟和数字模块,减少片外元件使用量,大幅缩小系统体积,同时能够提高测量系统的测量精度及可靠性。通过风洞测试表明,该系统能够完成360º风向检测,精度达到3°,风速的检测范围达到35 m/s。
关键词:MEMS;温度补偿;风传感器系统;智能传感器系统
中图分类号:TN36 文献标识码:A 国家标准学科分类代码:
Design of wind sensor system based on microcontroller
Zhang Yangbo, Shen Guangping, Dong Ziqiang, Qin Ming, Huang Qing’an
(Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nangjing 210096, China)
Abstract:This paper proposed an thermal wind sensor system based on Wheatstone full bridge. The sensor structure was optimized by ANSYS software in thermal field and electrical field. The chip was fabricated on the ceramic substrate by lift off process, and packaged by the direct chip packaging technology. The constant temperature difference mode is used to control the wind sensor system, which the integrated current-type D/A is introduced to set the initial state of this mode pensate the system fluctuation cased by the drift of ambient temperature, therefore the system working temperature extend from -40 ℃ to 60 ℃. Calorimetric mode adopt