文档介绍：Group Meeting Dong-Ming Fang April 18, 2008 微电子学研究院微电子学研究院微米纳米加工技术国家级重点实验室微米纳米加工技术国家级重点实验室 Group Meeting Dong-Ming Fang April 18,2008 Work in the last two pleted … 1 Read … 2 Read … 3 Read … 4 Downloaded … 5 Conceiving … 6 微电子学研究院微电子学研究院微米纳米加工技术国家级重点实验室微米纳米加工技术国家级重点实验室 Group Meeting Dong-Ming Fang April 18,2008 Work in the last two weeks ? Completed PPT file for oral speech In English Proper Contents About 35 Pages 微电子学研究院微电子学研究院微米纳米加工技术国家级重点实验室微米纳米加工技术国家级重点实验室 Group Meeting Dong-Ming Fang April 18,2008 Work in the last two weeks ? Thesis draft written by … Design … 1. Fabrication … 2. Measured … 3. 微电子学研究院微电子学研究院微米纳米加工技术国家级重点实验室微米纳米加工技术国家级重点实验室 Group Meeting Dong-Ming Fang April 18,2008 Work in the last two weeks ? Processes Information Storage PECVD:SiO2, Si3N4, SiC Sputter: Ti, Au, Pt, Al, Cr, W, Pb LPCVD: PolySi, SiO2,Si3N4 Si Oxidation:HO,O2,H2O Membrane Membrane Ion Injection:As+,P+,B+,BF2+ Diffusion: P+,B+ Adjusting Adjusting ICP: Si, Ti/Al, Cr/Cu, Cr/Pt, Ti/Pt/Au, Pyrex, SiO2 RIE:Si,SiO2,Si3N4, SiO2, Solutions: KOH, BHF, HF, H3PO4 Etching Etching Anode (electrostatic), Au-Si, hot Bonding Bonding 微电子学研究院微电子学研究院微米纳米加工技术国家级重点实验室微米纳米加工技术国家级重点实验室 Group Meeting Dong-Ming Fang April 18,2008 Work in the last two weeks 1. Silicon Microfabrication : ….. 2. MEMS Reliability: ….. 3. NSFC Requisition : …. 4. Other: Published papers of IME ? References and PPT files 微电子学研究院微电子学研究院微米纳米加工技术国家级重点实验室微米纳米加工技术国家级重点实验室 Group Meeting Dong-Ming Fang April 18,2008 Work in the last two weeks ? Safety and Operation Handbook Safety Exit, Fire extinguisher, Shower equipment, Eye bath system MSDS Health hazard, Fire hazard, Specific hazard, Reactivity Etching Room 600m 2, Etching platform, Shelf, Reagent chemicals 微电子学研究院微电子学研究院微米纳米加工技术国家级重点实验室微米纳米