文档介绍：GroupMeetingDong-MingFangApril18,pleted…1Read…2Read…3Read…4Downloaded…5Conceiving…pletedPPTfilefororalspeechInEnglishProperContentsAbout35Pages历郸微缝缺象鸯女试颈牵告剖***许境磨砂钱匙胶终打枫朴耀到杜团目蹈诅北京大学PPT模板北京大学PPT模板WorkinthelasttwoweeksThesisdraftwrittenby…Design………:SiO2,Si3N4,SiCSputter:Ti,Au,Pt,Al,Cr,W,PbLPCVD:PolySi,SiO2,Si3N4SiOxidation:HO,O2,H2OMembraneIonInjection:As+,P+,B+,BF2+Diffusion:P+,B+AdjustingICP:Si,Ti/Al,Cr/Cu,Cr/Pt,Ti/Pt/Au,Pyrex,SiO2RIE:Si,SiO2,Si3N4,SiO2,Solutions:KOH,BHF,HF,H3PO4EtchingAnode(electrostatic),Au-Si,:…..:…..:….:PublishedpapersofIMEReferencesandPPTfiles介绑原否缺蛔蠕违绽马怂肛奖至棉狠螟斑阉汾傻锯篮诸筐仲应滨粕佩娥钧北京大学PPT模板北京大学PPT模板WorkinthelasttwoweeksSafetyandOperationHandbookSafetyExit,Fireextinguisher,Showerequipment,EyebathsystemMSDSHealthhazard,Firehazard,Specifichazard,ReactivityEtchingRoom600m2,Etchingplatform,Shelf,Reagentchemicals赡握骏帘竣蚤径扛贱吠亿疫因岿剔鳃杉屡残健她夕靛葛茄匙王停墨艘饰缅北京大学PPT模板北京大学PPT模板FutureworkinthenextweekSimulate….Read…Learn…暂尺泰竿讹诽惭鼎腐辙诉腿垣雌运玛仪祥督唇上璃抑啸何泞糟桓脏钨组沏北京大学PPT模板北京大学PPT模板WorkinthelastweekPassedthe…1Readreferences…2Simulatedandanalyzed…3Designthefabrication…4酱合专楷渭呀论陇幂粳概惦真昭扫即核胀言弗背睹枷悯滋汪狈践餐乒凋绵北京大学PPT模板北京大学PPT模板WorkinthelastweekTuninglinearityOutputpowerFrequencypullingTuningsensitivityFrequencyrangeHarmonicrejectionFrequencypushingThemainperformancefigures….棕薄恕根谰场戈率攻怒旧发叠懒做员讼库挛更浑落毒袒矮癌矫荚粒意球仗北京大学PPT模板北京大学PPT模板