文档介绍：
The Structure Characteristics of Zinc Stannate Thin Films
prepared by Sol-gel Method#
ZHANG Haijiao, JIAO Zheng**
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(School of Environmental & Chemical Engineering, Shanghai University)
Abstract: Increasing attention has been paid to the production and investigation of the Zinc-Stannate
films, which are found sensitive to NOx gases and humidity. Using sol-gel technical, Zn2SnO4 thin
films were essfully deposited on alumina and silicon substrates. Treated under different
temperatures and observed with SEM, it can be seen that according to increased temperatures, the
structures of thin films changed from amorphy to hexagonal crystal. Furthermore, the gas sensitive
characteristics of Zinc Stannate thin films were also investigated.
Key words: Zinc-Stannate; Thin film; Sol-gel; Gas sensitivity
0 Introduction
The sol-gel technology is an inexpensive method for deposition of a great
variety of oxide thin films on different substrates. Especially this technique is used
in the fabrication of gas sensor structures based on changes in the electrical
characteristics of the films.
ZnO and SnO2 has been used as gas sensors for decades. However, the ZnO─
SnO2 system were less researched although zine stannate, Zn2SnO4, has a wide
variety of applications. Recent publications report the preparation of the films of
spinel zinc stannate. Thus, Enok