文档介绍：HANDBOOK OF THIN-FILM
DEPOSITION PROCESSES AND
TECHNIQUES
Principles, Methods, Equipment and
Applications
Second Edition
Edited by
Krishna Seshan
Intel Corporation
Santa Clara, California
NOYES PUBLICATIONS
WILLIAM ANDREW PUBLISHING
Norwich, New York, .
Copyright © 2002 by Noyes Publications
No part of this book may be reproduced or
utilized in any form or by any means, elec-
tronic or mechanical, including photocopying,
recording or by any information storage and
retrieval system, without permission in writing
from the Publisher.
Library of Congress Catalog Card Number: 2001135178
ISBN: 0-8155-1442-5
Printed in the United States
Published in the United States of America by
Noyes Publications / William Andrew Publishing
13 Eaton Avenue
Norwich, NY 13815
1-800-932-7045
10 9 8 7 6 5 4 3 2 1
Library of Congress Cataloging-in-Publication Data
Handbook of Thin-Film Deposition Processes and Techniques / [edited]
by Krishna Seshan. -- 2nd edition
p. cm.
Includes bibliographical references and index.
ISBN 0-8155-1442-5
1. Thin film devices -- Design and construction -- Handbooks,
manuals, etc. I. Seshan, Krishna. II. Title.
2001135178
'72--dc19 CIP
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